Subscribe to the OCW Newsletter

Help| Contact Us

FIND COURSES
Topic

MIT Course Number

Department
New Courses

Most Visited Courses

OCW Scholar Courses

Audio/Video Lectures

Online Textbooks

Supplemental Resources

OCW Highlights for High School

MITx & Related OCW Courses

MIT Open Learning Library
Energy

Entrepreneurship

Environment

Introductory Programming

Life Sciences

Transportation
繁體字 / Traditional Chinese

Türkçe / Turkish

(비디오)한국 / Korean
For Educators
- Chalk Radio Podcast
- OCW Educator Portal
- Instructor Insights by Department
- Residential Digital Innovations
- OCW Highlights for High School
- Additional Resources
Give Now
About

Home » Courses » Electrical Engineering and Computer Science » Physics of Microfabrication: Front End Processing » Audio Lectures » 20: Etching - Introduction

20: Etching - Introduction

Course Home
Syllabus
Calendar
Readings
Audio Lectures
Projects
Download Course Materials

About this Track
Playlist
Download this Track

20: Etching - Introduction

3: Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)

3: Crystal Growth, Wafer Fa...

4: Wafer Cleaning and Gettering (cont.)

4: Wafer Cleaning and Gette...

5: Wafer Cleaning and Gettering - Contamination Measurement Techniques

5: Wafer Cleaning and Gette...

6: Oxidation and the Si/SiO2 Interface: Deal/Grove Model, Thin Oxide Models

6: Oxidation and the Si/SiO...

7: Oxidation and the Si/SiO2 Interface: 2D Effects, Doping Effects, Point Defect

7: Oxidation and the Si/SiO...

8: Dopant Diffusion - Need for Abrupt Profiles, Fick's Laws, Simple Analytic

8: Dopant Diffusion - Need ...

9: Dopant Diffusion - Numerical Techniques in Diffusion, E Field Effects

9: Dopant Diffusion - Numer...

10: Dopant Diffusion - Fermi Level Effects, I and V Assisted Diffusion

10: Dopant Diffusion - Ferm...

11: Dopant Diffusion - Revi...

12: Ion Implantation and Annealing - Analytic Models and Monte Carlo

12: Ion Implantation and An...

13: Ion Implantation and Annealing - Physics of E Loss, Damage, Introduction to TED

13: Ion Implantation and An...

14: Transient Enhanced Diffusion (TED) - +1 Model, (311) Defects and TED Introduction

14: Transient Enhanced Diff...

15: Transient Enhanced Diffusion (TED) - Simulation Examples, TED Calculations, RSCE in detail

15: Transient Enhanced Diff...

16: The SUPREM IV Process Simulator

16: The SUPREM IV Process S...

17: Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth

17: Thin Film Deposition an...

18: Thin Film Deposition and Epitaxy - CVD Examples and PVD

18: Thin Film Deposition an...

19: Thin Film Deposition and Epitaxy - Modeling Topography of Deposition

19: Thin Film Deposition an...

Now Playing

20: Etching - Introduction

20: Etching - Introduction

21: Etching - Poly Gate Etching, Stringers, Modeling of Etching

21: Etching - Poly Gate Etc...

22: Silicides, Device Contacts, Novel Gate Materials

22: Silicides, Device Conta...

23: Growth and Processing of Strained Si/SiGe and Stress Effects on Devices

23: Growth and Processing o...

Free Downloads

Audio

iTunes U (MP3 - 31MB)
Internet Archive (MP3 - 31MB)

Find Courses

Find by Topic
Find by Course Number
Find by Department
New Courses
Most Visited Courses
OCW Scholar Courses
Audio/Video Courses
Online Textbooks
Instructor Insights
Supplemental Resources
MITx & Related OCW Courses
MIT Open Learning Library
Translated Courses

For Educators

Chalk Radio Podcast
OCW Educator Portal
Instructor Insights by Department
Residential Digital Innovations
OCW Highlights for High School
Additional Resources

Give Now

Make a Donation
Why Give?
Our Supporters
Other Ways to Contribute
Become a Corporate Sponsor

About

About OpenCourseWare
Site Statistics
OCW Stories
Newsletter
Open Matters Blog

Tools

Help & FAQs
Contact Us
Accessibility
Site Map
Privacy & Terms of Use
RSS Feeds

Our Corporate Supporters

About MIT OpenCourseWare

MIT OpenCourseWare is an online publication of materials from over 2,500 MIT courses, freely sharing knowledge with learners and educators around the world. Learn more »

© 2001–2025
Massachusetts Institute of Technology

Your use of the MIT OpenCourseWare site and materials is subject to our Creative Commons License and other terms of use.